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1. sample of the loaded vacuum chuck, open the vacuum valve control switch, make the samples safely and firmly adsorbed on the chuck 2. USES mobile chuck chuck X/Y axis control knob platform, under the microscope low-power objective focus to see the sample 3. USES mobile chuck chuck X/Y axis control knob platform under test sample of the switch point move to microscope 4. microscope for high-magnification lens, found in large magnification, specific focus and sample x-y re-complicating microscope, image adjusting is clear, with points in the center of the microscopic view5. After the position of the measuring point is confirmed, adjust the position of the probe holder. After installing the probe, you can first move the probe to the position close to the measuring point by eye observation.
1. probe station should be on the mesa of stable and reliable, it is best to have shockproof device working platform, avoid in high temperature, damp vibration, direct sunlight and dusty environment use 2. using the best temperature range for 5 ~ 40, optimal humidity is 40% to 85%, if the humidity below 30% in the air, reliable humidity controller to control, to maintain the range of 50% ~ 60% when using Windows and doors closed as much as possible, make indoor dehumidification effect 3. to use the power supply: 220 10%, 50 ~ 60 hz.
