Product Overview
SEMISHARE's Wafer-Level Silicon Photonics Test System leverages our well-established semi-auto and full auto probe stations. Equipped with a high-precision six-axis displacement stage, the system offers a freely selectable pivot point, enabling users to perform optimizations through rotation around the beam waist, focal point, or optical axis. By combining the high-speed, stable motion performance of the semi-/fully automatic probe stations with the submicron-level precision positioning of the coupling system, an optimal balance between efficiency and accuracy is achieved. The System incorporates comprehensive tools, fixtures, and a suite of measurement and calibration technologies, significantly reducing the preparation time required in conventional test setups. The entire photonic coupling test system offers a highly flexible solution, enabling rapid switching between test modes to accommodate diverse requirements—from single fiber to array configurations, and from vertical to edge coupling.
Basic Information
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Application direction
Electro-optical performance testing of silicon photonics wafers, active and passive device characterization, process monitoring and yield improvement, as well as complete test requirements from R&D validation to high-volume manufacturing.
Technical characteristics
System Composition
The SEMISHARE wafer-level silicon photonics test system is built around fully automatic or semi-automatic probe stations as its core. It integrates a six-axis precision positioning stage and a high-precision optical coupling unit, with capacitive sensors and systems providing precise positioning feedback. Silicon photonics measurement instruments and coupling software perform electro-optical testing and coupling control, while interface components such as RF probes, DC probes, and optical fibers connect to the devices under test, forming a complete measurement and coupling platform for silicon photonics chips.
Compatible with multiple coupling methods
● Edge Coupling：Silicon photonics edge coupling offers low coupling loss, wider spectral bandwidth, and superior stability. It is less affected by grating filtering effects and has low polarization dependence, making it suitable for multi-polarization scenarios. The edge coupling solution provided by SEMISHARE supports automated alignment for chip edge coupling. By switching fiber fixtures, it also supports both single-fiber and fiber array (FA) coupling methods.
● Wafer-Level Edge Coupling：Wafer-level edge coupling is a key technology for achieving efficient optical fiber-to-waveguide coupling in silicon-based optoelectronic integrated circuits. Its core principle lies in achieving batch alignment and coupling between fiber arrays and chip edge waveguides through wafer-level processes. The micro-grooves in wafer-level silicon photonics chips typically have a depth of ≥50μm and a width of ≥100μm. To achieve good coupling between the FA fiber array and array waveguides within such a tiny space, high-precision XYZ positioning and UVW angular alignment are required.
● Vertical (Grating) Coupling：Silicon photonics vertical coupling is one of the core technologies for achieving efficient fiber-to-waveguide coupling in silicon-based optoelectronic chips. It uses grating structures to couple light vertically from the chip surface into the waveguide, making it suitable for wafer-level testing and high-density integration scenarios. Additionally, vertical coupling facilitates batch testing and automated measurement. The coupling grating can be placed anywhere on the chip, supporting three-dimensional integration.
Wafer-Level Silicon Photonics Test Software
The SEMISHARE wafer-level silicon photonics test software combines the probe station's machine vision capabilities with optical positioning and the six-axis coupling system to enable multiple coupling methods. It provides a graphical user interface (GUI) that allows users to flexibly control the optical positioning system. The interface can also be used to configure scanning parameters, perform initial optical alignment, and other operations. Once alignment is completed, all calibration functions are automatically executed by the software.
The software supports automatic alignment, sub-die management, optical alignment verification, calibration wafer verification, wafer training, measurement site training, and more.
Custom Fixtures for Multiple Test Types
Supports:
● Horizontal edge coupling fixture
● Wafer-level edge coupling fixture
● Wafer-level edge coupling fixture
● Single fiber
● Fiber array (FA)
● Angle offset
Supports single fibers and fiber arrays (FA) of various angles and sizes, meeting both horizontal and vertical coupling requirements.
PTS™ Integrated Test System Software
Developed specifically for engineering & high-volume manufacturing (HVM) customers, meeting the needs of those requiring flexible and fast access to test results.
Software Highlights:
● Quickly integrates various programmable instruments
● Supports control of mainstream probe stations (engineering & production models)
● Test functions can be highly customized according to user requirements
● Supports multi-site parallel testing
● Platform and test flow are decoupled/separated
● Raw data saving, automatic data consolidation/analysis, and report generation using user-defined templates
● Open API / interface options for easy test data export
● Flexible configuration of test items
● Customizable UI layout
● Supports user-defined test flow development
