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Product Overview Functional structure Specifications Download
LCVD Panel Laser Repair System

Product Overview

LCVD laser repair equipment is mainly an automatic repair equipment designed for the poor process and defects of LCD display. With the leading machine vision system of SEMISHARE as the core, LCVD laser repair equipment can provide high-precision repair and low-cost solutions for the defects of LCD finished products and semi-finished products, so as to improve the business efficiency of enterprises to a greater extent.

Basic Information

Product number LCVD-G6 | LCVD-G8.5 working environment Open type
electricity demand 380V,50Hz,3Phase,approx.40AMax / 380V,50Hz, 3Phase, approx.60A Max Control method Full-Automatic
Product Size 2850mm wide x2500mm long x2500mm high equipment weight About 7500 kg

Application direction

TFT-LCD and OLED Array Panel circuit open and short circuit repair,Mask defect repair.

Technical characteristics

Product Feature

●High power optical image recognition, automatic calibration focus. ●Laser system visual operation, greatly improve the efficiency of repair. ●Linear motor structure,1um laser precision, high speed mute. ●Automatic AOI positioning, automatic upper and lower slice. ●Rich software testing function, high precision calibration of mechanical system. ●Repair shape can be edited, can be multi - station design. ●Leading internal anti - shock system device, more stable operation. ●Electrical shielding system, shielding light and electromagnetic interference.

Product Feature

●High power optical image recognition, automatic calibration focus. ●Laser system visual operation, greatly improve the efficiency of repair. ●Linear motor structure,1um laser precision, high speed mute. ●Electrical shielding system, shielding light and electromagnetic interference. ●Rich software testing function, high precision calibration of mechanical system. ●Minimum machining accuracy up to 1*1um. ●Leading internal anti - shock system device, more stable operation. ●Can be upgraded for sample testing up to 120 inches.

Title

Model LCVD series

Specification
Model LCVD-G6 LCVD-G8.5
Dimension W: 2850mm*L: 2500mm*H: 2500mm W: 4000mm*L: 3500mm*H: 2500mm
Weight (about) 7500KG 10500KG
Electricity Demand 380V, 50Hz, 3Phase, approx. 40A Max. 380V, 50Hz, 3Phase, approx. 60A Max.
Repair capacity Repairable panel size L * W ≤ 1500mm * 1850mm, L * W ≤ 2500mm * 2200mm, Thickness ≤ 3mm
Thickness ≤ 3mm Laser Laser system DPSS Laser cutting system
CVD material W, Cr, MO, Al CW Laser deposition system
line deposition velocity 5~10μm/s ( Thickness 5000Å ) Energy regulation
accuracy
0-1000 steps
Single defect repair time After positioning, the time of repairing 0-100%
a single defect is about 5 seconds. Slit size 0~2.5mm
Recipe Software edit and stroed locally Slit accuracy 1μm
Cutting width 1μm~50μm adjustable

Laser energy calibration

mode

Automatic calibration
CVD width 2μm~30μm adjustable Calibration time cost 3mins
CVD edge accuracy +/-0.5μm Laser energy Better than 2%
CVD thickness 2000Å ~15000Å Adjustable calibration accuracy
Resistance of
<65Ω (width: 5μm, Length : Wavelength Cut Laser: IR 1064nm, GRN 532nm,
deposition line 50μm, Thickness : 5000 ) UV266nmCVD CW laser: NUV 351nm
CVD stability Cleaning times by cleaning Pulse width < 12 ns
machine >10 times Spot size 2.0~ @50X  object 1064nm
Strong acid-base test > 1H ( test on standard mask)
Brush wipe > 1H

Scanning energy

uniformity

Better than 5% @IR
Ultrasonic 1Mhz > 1H Laser lifetime Cut Laser: 1 billion excitation
Gantry X-Y-Z travel range LCVD-G6 1500 * 1850 * 58mm,
LCVD-G8.5 2500 * 2200 * 58mm
CVD CW laser: 8000 hours
Repair mode Scan mode and Step mode
X-Y velocity 0~400mm/s adjustable Scanning path Arbitrary path definition
X-Y resolution(minimum movement) 0.1μm Control Working mode Automatic repair, automatic data
Z velocity 0~2mm/s Adjustable load, on-line communication
Z resolution (minimum movement) 0.1μm Manual or automatic repair
Repeatability accuracy +-5μm Panel load Robot
Repair alignment accuracy 0.1μm CIM system Yes
Microscope

magnification

50X~ 1000X Anti-vibration Vibration free table installed

Industry PC

23-inch display & computer: i7

objectives

5X,10X, 20X, 50X NIR, 50X processor, 2 blocks 1TB hard disk
UV, 50X NUV Objects (one of which is a backup hard disk),

Optical resolution

0.7μm 8G memory, 1G Independent video
card, DVD-ROM
Objective switching speed 0.2~0.7s Communication interface RS232 / EtherCAT / GPIB etc.

Security

Frame covered , and the operator
Switching lens deviation Less than 3μm operates outside .EMO
Focus Laser auto focus

Limit sensor, Motion platform and

Laser system limit interlock

Cemera 2 million pixels Alarm
Lighting TOP/Bottom coaxial LED light,Light adjustable independently
Direction of application TFT-LCD and OLED array panel short circuit and open circuit repair, Mask defects repair
Characteristic
Stable laser repair results Feature-rich software
Ultrafast laser repair speed Repair shape can be edited arbitrary
Linear Motor platform with 0.1μm Resolution Automatic AOI defect location
Minimal damage Multistation desgin
Laser precision 1μm Automatic panel exchange

     
Customer Service
Request for quotation Request for quotation
Contact number

Contact number

0755-2690 6952 turn 801/804/806/814

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