Product Overview
The mask LCVD repair equipment mainly uses laser-induced chemical vapor deposition (LCVD) technology to repair defects on the masks. The SEMISHARE LD14 series offers a wide range of deposition thickness and high repair precision. The micron-level laser precision can effectively deal with masks with extremely small pitches. With micron-level laser accuracy, it effectively addresses defects on masks with extremely small pitches, providing high-precision, low-cost repair solutions for high-value mask defects, thus significantly reducing production and operational costs for enterprises.
Basic Information
| Product number | LD14 | working environment | Enclosed |
| electricity demand | AC 220V ±5% 50Hz | Control method | Full-automatic |
| Product Size | Customizable | equipment weight | Customizable |
Application direction
It can be used to fill in missing parts on a mask or repair patterns. This technique is often employed to fix issues like open circuits and short circuits.
Technical characteristics
Mask LCVD Repair LD14
●For products with different thicknesses and large spans, there is no need for manual adjustments when changing products; the equipment can automatically adapt to the height adjustment of the deposition head.
●The vapor deposition management control system can quantitatively evaporate materials, ensuring that long-term use does not result in prolonged deposition times due to decreased evaporation rates from material consumption, thus meeting customer demands for process stability.
●Exhaust gas recovery treatment utilizes high-temperature filters with up to dozens of layers, effectively capturing harmful components in the decomposed exhaust gas, which is then cooled and directed into the factory’s exhaust system.
●Customized products can be provided according to customer needs.
Mask Cut Repair L14
●It can handle the repair of various materials including chromium, silicon, silicon nitride, quartz, EUV materials, foreign particles and stubborn unknown particles.
●It can precisely remove or repair defective areas without affecting other parts of the mask.
●It can provide customized products according to customer needs.
Independent research and development of software integration system, more compatibility
●Supports semi-automatic control (manual or automatic testing)
●Automatic wafer calibration, wafer mapping, die size measurement, alignment, and remote access to test data
●One-click automatic calibration of RF probe module, with automatic probe cleaning function
●One-click adaptive four-axis Chuck precision calibration, supporting micrometer-level pad point testing
●Supports single-point or continuous testing
●Strong data storage and processing capabilities
●Ability to divide test results into BIN values and identify NG devices
●Multiple system integration capabilities, allowing independent upgrades of operating systems, application systems, and device testing systems
Air film shock absorption system
The industry's unique internal integration of high-performance air film shock absorption system and the dual design of the external isolation barrier, effectively avoid the vibration caused by the operator's touch;In addition, a long-aging casting is used as the substrate to suppress the vibration in the process of motion at the fastest speed of 1S in the industry to ensure the stable operation of the equipment, and to ensure that the screen does not shake when the image is enlarged at 2000X;At the same time, the high-precision control valve ensures that the height error of the moving part of the platform is 0.1mm, effectively realizing the test ability of fast die to die, ensuring that the whole system can still maintain a stable running state when moving at a high speed, and greatly improving the test efficiency.
Industry leading 3 times imaging technology
12:1 fast and precise motorized zoom microscope, zoom range 0.6~7.2X, image resolution 3.05μm, total magnification range 33X~396X.
The industry's most efficient CHUCK system, test efficiency significantly improved
● High efficient CHUCK test system，running speed≥40mm/s, motion precision≤±1μm , while moving the translocation time index time 500ms, excellent system operating parameters have reached the highest level of the industry, ultra-high test accuracy and efficiency to meet all kinds of wafers and devices of high repeatability and stability test, test efficiency significantly improved
●Temperature control accuracy and stability better than ±0.1℃, providing reliability wafer testing in high and low temperature environments
●The compact structure design of four-dimensional motion with low center of gravity ensures the motion speed of 40mm/s while maintaining the stability of motion acceleration and deceleration
A8 Full Automatic Prober
●High precision and test speed, greatly improving test efficiency
●Micron-scale fully closed-loop motion control
●High voltage and high current test application
●Bernoulli arm support sheet
●Small size, light weight, smaller footprint
●24X7 hours on-chip detection
Technical characteristics
Pneumatic type mobile platform has the function of fast moving chuck, can meet the needs of efficient manual test by the corresponding gas float switch, provides three kinds of method of fast moving；Three - stage lifting needle base platform，the needle seat platform can rise and fall rapidly (0,300um,3mm)+ fine adjustment (40mm, moving resolution 2~5μm)；built-in 3 zoom multi-view, triple-rate concentric focal path system (internal optical zoom: 0.6:1；2.5:1；9:1);shielding cavity structure design，provides the best low noise and low leakage current capacity.At the same time, it keeps the sample under nitrogen or positive pressure environment at low temperature without frosting, and the unique cavity blowing structure prevents cryogenic frosting.
Product Feature
● The industry-leading Keithley testing platform.
● Ultra high precision source table, achieve accurate measurement.
● Modular design, stable performance and simple maintenance.
● Rich software functions, convenient and flexible operation.
● Visual interface, data analysis is clear.
● High and low temperature variable temperature environment, effective implementation of reliability testing.
Product Feature
●The fastest test speed in the industry greatly improves the test efficiency. ●Leading internal anti - shock system device, more stable operation. ●0.1um high precision linear motor platform. ●Electrical shielding system, shielding light and electromagnetic interference. ●Super high test precision, accurate measurement is stable and reliable. ●Compatible with high power metallographic microscope, automatic focusing. ●Automatic needle clearing, automatic needle measuring. ●Automatic test, data automatically read.
A12 Full Automatic Prober
●Super high test precision and test speed, greatly improve productivity benefits
●Fully automated system running, fast safe and reliable test
●Support single point testing and continuous testing
●Integrated control system, fast access to instrument testing
●XY maximum speed (screw structure): 250mm/s; XY maximum speed (linear motor): 500mm/s
●Index time (screw structure): 280ms(10mm Die size, 200μm separation height); Index time (linear motor): 200ms(5mm Die size, 300μm separation height)
●Rich software automation test, precise mechanical precision calibration
●Automatic wafer thickness measurement and ID reading card can be upgraded
●Leading internal anti - shock system device, more stable operation
Product Feature
●Large handle drive, no clearance movement. ●Ergonomic design, convenient and comfortable to operate. ●Multi-band laser application, fast switching and accurate cutting. ●Compatible with high power metallographic microscope for fine adjustment and movement. ●No backtrip difference design, accurate positioning. ●The air cooling structure is compact and requires no maintenance. ●High precision system, laser machining accuracy up to 1*1um. ●Leading internal anti - shock system device, more stable operation.
> POMater™ Adaptive shock absorbing base
The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.
>The chuck can be adjusted lifting
The chuck can be adjusted lifting, the stroke is 5mm, and the accuracy is 10μm, which is convenient for the sample to quickly separate the probe.
>Pneumatic fast lifting of microscope
The microscope is pneumatically quickly lifted, which is convenient to replace the microscope and the probe card holder.
>Large size platform design
Large-size body structure enhances operating comfort. The micropositioner platform with larger space supports the loading of probe cards and improves the efficiency of probing test.
Vacuum Chamber
Vacuum chamber adopts double shielding cavity and external cavity structure, to provide the sample test of extreme pressure of 10-4 pa vacuum environment (when using molecular pump) to test the low temperature, avoid the water vapor in the air condenses into dew on samples, to avoid excessive leakage or probe cannot contact electrode and make the test to fail at the same time, due to the vacuum thermal insulation effect but effective provide refrigeration efficiency, high temperature test, to avoid the oxygen in the air oxidation samples, to avoid the sample electrical error on the physical and mechanical deformation.
Probe arm XYZ regulating mechanism
The XYZ adjusting mechanism of the probe arm adopts the structure of self-locking lead screw and cross roller guide rail to achieve the precise positioning of the probe at 10um. The probe drift is better than the high-precision point needle of 60nm/30mins. Meanwhile, the three-axis tubular clamp and the three-axis cable with high shielding function are adopted to achieve the leakage test accuracy of 50FA.
Microscope regulating mechanism
By adjusting the telescopic height of the support frame and the adjustable seat of the microscope, the microscope regulating mechanism can observe the 20x eyepiece and 0.8-5 times the zoom ratio of the objective lens in any area of the sample, so as to realize the magnification ratio of the sample of 16X-100x.
Refrigerant flow regulation system
The refrigerant regulating system is composed of the pressure control valve of compressed nitrogen in the duwa tank and the needle valve of precise regulation to control the low temperature. The pressure in the duwa tank can be adjusted by adjusting the pressure control valve of compressed nitrogen pressure, so as to control the pressure flowing out of the refrigerant and then adjust the flow rate of refrigerant.By adjusting the precision needle valve and then precise control of refrigeration flow, the function of accurate low temperature control is finally realized.
Refrigerant Coaxial Loop
Refrigerant coaxial circuit of the refrigerant from the middle line into the sample set, through the shielding cavity bottom chamber, in return to the outer coaxial loop back tube, finally through the vent discharge to outdoor refrigerant coaxial circuit makes the refrigerants in the process of discharge to exploit, to create a relatively much lower room temperature environment, inhibits into sample sets of refrigerant consumption in advance, so as to improve the efficiency of refrigerant in the refrigeration, less consumption of refrigerant.
Shockproof Platform
Shockproof system USES the import of South Korea's big companies air spring type brace shockproof platform by the shape of the air spring material spring chamber volume and aid tank capacity damping aperture and level regulator and a series of suspension design, to realize the system intrinsic frequency is 1.5 Hz, vertical level of the eigen frequency of 1.2 Hz low natural frequency, load bearing of 400 kg of excellent bearing capacity effectively avoid small to test the vibration of low frequency band.
Product Feature
●High power optical image recognition, automatic calibration focus. ●Laser system visual operation, greatly improve the efficiency of repair. ●Linear motor structure,1um laser precision, high speed mute. ●Automatic AOI positioning, automatic upper and lower slice. ●Rich software testing function, high precision calibration of mechanical system. ●Repair shape can be edited, can be multi - station design. ●Leading internal anti - shock system device, more stable operation. ●Electrical shielding system, shielding light and electromagnetic interference.
Product Feature
●High power optical image recognition, automatic calibration focus. ●Laser system visual operation, greatly improve the efficiency of repair. ●Linear motor structure,1um laser precision, high speed mute. ●Electrical shielding system, shielding light and electromagnetic interference. ●Rich software testing function, high precision calibration of mechanical system. ●Minimum machining accuracy up to 1*1um. ●Leading internal anti - shock system device, more stable operation. ●Can be upgraded for sample testing up to 120 inches.
Product Feature
●Laser system visual operation, greatly improve the efficiency of repair. ●Repair shape can be edited, can be multi - station design. ●Linear motor structure,1um laser precision, high speed mute. ●Leading internal anti - shock system device, more stable operation. ●High power optical image recognition, automatic calibration focus. ●Local darkening can be achieved. ●Automatic AOI positioning, automatic upper and lower slice. ●Rich software testing function, high precision calibration of mechanical system.
The industry's most efficient CHUCK system, test efficiency increased by more than 40%
● The industry's most efficient CHUCK test system running speed & GT;70mm/s, motion precision 1 m, while moving the translocation time index time 500ms, excellent system operating parameters have reached the highest level of the industry, ultra-high test accuracy and efficiency to meet all kinds of wafers and devices of high repeatability and stability test, compared with other probe brands in the industry, the test efficiency is effectively increased by more than 40%. ●-60 ~300 is the highest temperature wide area in the industry, with temperature control accuracy and stability better than 0.08, providing reliability wafer testing in high and low temperature environments. ●The compact structure design of four-dimensional motion with low center of gravity ensures the motion speed of 70mm/s while maintaining the stability of motion acceleration and deceleration.
Industry leading 3 times imaging technology
Built-in SEMISHARE patent more than three zoom microscope view three times with JiaoGuang road system, 120 x 2000 x variable times optical amplifier, size view shows at the same time, more can make the point needle and convenient operation, double Basler 2 million pixels high speed CCD 23 "display and Mituyoyo high precision high resolution camera, precision positioning of high stability high definition, image output and high precision measurement and dynamic monitoring.
Auxiliary CHUCK module silicon wafer safe upper and lower
●The unique Chuck XY axis design in the industry has changed the common phenomenon that the probe system of other brands in the market is affected by the resistance of laminated plates in different directions and sizes, leading to the decline of motion stability.This ensures that the XY axis is not affected by the laminate when moving, making the motion precision and stability higher. ●Compared with other brands in the industry, the probe table cavity of SEMISHARE can be opened once and pulled out the entire Chuck mechanism to load and load silicon wafers at a speed of 370mm with a long stroke. The manual feeding of the Wafer is more convenient and faster.Meanwhile, the Chuck's rotation Angle range is larger, which requires lower demand for manual laying wafer, and the operation is more flexible and convenient.
Design of O-type needle seat platform
The probe testing system adopts the O-type needle seat platform design, which makes the most efficient use of the space of the needle seat, up to 12 needle seats can be placed at the same time. Compared with other probe brands in the market, the number of the needle seat is increased by 50%, effectively realizing more efficient and rapid testing.
Air film shock absorption system
The industry's unique internal integration of high-performance air film shock absorption system and the dual design of the external isolation barrier, effectively avoid the vibration caused by the operator's touch;In addition, a long-aging casting is used as the substrate to suppress the vibration in the process of motion at the fastest speed of 1S in the industry to ensure the stable operation of the equipment, and to ensure that the screen does not shake when the image is enlarged at 2000X;At the same time, the high-precision control valve ensures that the height error of the moving part of the platform is 0.1mm, effectively realizing the test ability of fast DIE to die, ensuring that the whole system can still maintain a stable running state when moving at a high speed, and greatly improving the test efficiency.
Anti-interference shielding system
Anti interference EMI/Spectral noise/external light closed shielding cavity, cavity with the surface of conductive oxide and nickel plating process, to ensure the conduction state between the parts so as to achieve the shielding effect, reduce the system noise, blocking interference effectively, and provide low leakage current protection, provides the best test environment for the weak electric signal test;At the same time, the closed chamber in the low temperature environment to avoid the test sample condensation, to ensure the wafer and device under the high and low temperature environment fast and safe reliability test.
Independent research and development of software integration system, more compatibility
●Support semi-automatic control (manual test or automatic test). ●Automatic Wafer calibration automatic Wafer mapping automatic die size measurement automatic align automatic test data can be accessed remotely. ●Automatic calibration of RF probe module with one key, automatic needle clearing function. ●One-key adaptive four-axis Chuck precision calibration, supporting micron pad point measurement. ●Single point or continuous testing can be supported. ● Strong data storage capacity and data processing capacity. ●The bin value can be divided to determine the device NG. ●Multi-system integration to upgrade the operating system application system and device test system independently. ●Intuitive and simple operation design, quick and easy operation, effective saving operation training time.
Flexible optional configuration and extension
Convenient instrument access and support system automatic expansion and upgrade, temperature control system loading;There are also a variety of test modules available. According to the test module, it can be used together with a variety of positioner fixtures, needle CARDS and probe tables, such as six-axis positioner RF cables.Many system operating parameters and features reach the highest level of the industry, can meet your different test needs, but also an ideal choice for more industry customers a semi-automatic probe table equipment.
> New upgraded chuck mobile platform
Enclosed mobile platform design, dustproof, error-proof operation, beautiful structure. The moving platform adopts THK precision lead screw drive + linear movement + no clearance return trip difference design + chuck locking function to improve chuck moving precision in many aspects.
> Chuck with 3-stage vacuum adsorption control
The central vacuum adsorption hole and 3-ring vacuum adsorption ring are used to fix the sample. Each vacuum channel of the chuck can independently control the central adsorption hole of the standard chuck to be 1mm in diameter. The chuck Angle can be rotated 360 and the precision of micro-rotation can be adjusted to 0.002 according to the requirements of customers, which is convenient to adjust the position of the sample to be tested.
> POMater™ Adaptive shock absorbing base
The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.
>Chuck Air bearing move technology
Pneumatic type mobile platform has the function of fast moving chuck, can meet the needs of efficient manual test by the corresponding gas float switch, provides three kinds of method of fast moving: one hand control X/Y direction fast moving, hands control samples total plane fast moving traditional ball/bearing type samples can only achieve X/Y axis one-way movement, and movement speed slower;Although the ordinary air-floating sample table can realize full plane rapid movement of the sample table, it cannot realize one-way accurate movement positioning of the X/Y axis, which can meet the needs of production measurement. The 3-weight air-controlled sample table perfectly combines and realizes the above two functions.
>Large handle differential head drive
Chuck the mobile platform is equipped with coarse and fine adjustment function, fine adjustment knob driven by the industry's top Japan Mitutoyo big handle differential head, small compared with the traditional differential head adjustment, feel more comfortable to adjust operation more smoothly and no return bad, really realize super smooth efficient test manually, improve test efficiency, saving the cost of customer tests.
>Microscope air - controlled lifting control
The microscope can rise and fall 50mm by means of air control. The microscope can rise and fall smoothly by means of high quality valve control and fine adjustment of high pressure air inlet and outlet throttling, so as to facilitate the replacement of objective lens and better protect against accidental contact damage between objective lens and fixture in the test.
> Three - stage lifting needle base platform
The needle seat platform can rise and fall rapidly (0,300um,3mm)+ fine adjustment (40mm, moving resolution 2~5um). All parts of Platen can rise and fall at the same time (there is no different phenomenon). After rising and falling, the repeatability of the probe in x, Y and Z directions of needle marks on the pad is better than that of othersThe 1um, repeatable (1 m) needle base platform has three discrete positions for contact, separation (300 m) and loading (3mm) and is equipped with a safety lock to prevent accidental damage to the probe or wafer while providing intuitive control and accurate contact positioning for the most accurate measurement. This function is important in high frequency and high power testing.
> Loadable laser
Multiband laser cutting system can be applied to a load in the vast majority of microscope on the analysis of the failure, can realize precise cutting and selective onlookers level material removal precision and reliable advanced laser transmission system (ABDS) can choose different band to deal with different material cutting and cutting work laser output energy of 2.7 mJ, largest energy adjustable series 300 water cycle cooling structure make the system more compact and dispensing with maintenance.
