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    M4" Basics Manual Probe Station

    Product Overview

    A Basics type based on the university education and laboratory test wafer prober, this equipment is mainly applied in the semiconductor industry, as well as test of the photoelectric industry, including research and development of precision electrical measurement of complex high-speed device, the chip and LD/LED/PD tests, PCB/packaging device testing, rf testing 50 microns electrode/PAD test materials/components/CV IV characteristic test, etc.

    Basic Information

    Product number M4 working environment Open type
    electricity demand 220V,50~60Hz Control method Manual probe station
    Product Size 400mm *400mm *550mm (L*W*H) equipment weight About 30 kg

    Application direction

    This equipment is mainly used for testing in semiconductor and optoelectronic industries, including r&d chip and LD/LED/PD test of complex high-speed devices,PCB/ package device test, AND IV/CV characteristic test of electrode /PAD test material/device over 50 microns.

    Technical characteristics

    > Flexible application design

    Compact and sturdy frame structure design, stable performance. Easy operation and quick start, reduce the training time of equipment use. The modular structure of UPStart supports late expansion and upgrade of devices. The microscope bracket can be rotated 360 times for fast loading of DUT. The chuck Angle can be rotated 360 times and the precision of micro-rotation is 0.002, which is convenient to adjust the position of the sample to be tested.

    > New upgraded chuck mobile platform

    Enclosed mobile platform design, dustproof, error-proof operation, beautiful structure. The moving platform adopts THK precision lead screw drive + linear movement + no clearance return trip difference design + chuck locking function to improve chuck moving precision in many aspects.

    > Chuck with 3-stage vacuum adsorption control

    The central vacuum adsorption hole and 3-ring vacuum adsorption ring are used to fix the sample. Each vacuum channel of the chuck can independently control the central adsorption hole of the standard chuck to be 1mm in diameter. The chuck Angle can be rotated 360 and the precision of micro-rotation can be adjusted to 0.002 according to the requirements of customers, which is convenient to adjust the position of the sample to be tested.

    > Sturdy TNT construction pin - seat platform

    The center of the needle-seat platform is supported by TNT column structure, which is combined with the thickened aluminum alloy material to improve the rigidity, forming a firmer and more stable needle-seat platform and achieving the best measurement effect.

    > Adaptive shock absorbing base

    The self-adaptive shock-absorbing base is designed with imported shock-absorbing materials from Germany to enhance elastic support, to achieve different degrees of rigidity, hardness and bearing range, and effectively filter vibration source interference in the environment to ensure stable contact between the probe end and the Pad of the sample, improving the stability of the test.

    Model SM series




    SM-6 mini



    L :  400mm*
    W : 400mm*
    H :  550mm


    L : 680mm*
    W : 530mm*
    H : 550mm

    Weight (about)




    Electricity Demand

    220VC, 50~60Hz


    Size & Rotation angle

    4", 360° Rotation

    6", 360° Rotation

    6", 360° Rotation

    X-Y Moving range

    4" * 4"

    4" * 4"

    6" * 6"

    Moving resolution


    Sample fixed mode

    Vacuum adsorption

    Electrical design

    Electrical Floating with Banana plug adapter, can be used as a backside electrode


    U Shape

    6 Micropositioners available

    8 Micropositioners available


    Moving range

    360° Rotation Z : 50.8 mm


    16~100X  (200X as a option)

    CCD Pixel

    50W (Analog) / 200W (Digital) / 500W (Digital)


    X-Y-Z Moving range


    Mechanical resolution

    10μm / 2μm / 0.7μm

    Current leakage accuracy

    10pA / 100fA (with Shielding Box

    Cable connectors

    Banana head / Crocodile clip /  Coaxial / Triaxial

    Optional Accessories

    Hot chuck

    Light intensity / wavelength testing

    Shielding box

    RF Testing accessoriess

    Special Adapter

    Active probe

    Vibration Free Table

    Low current / Capacitance test

    Gold-plated chuck

    Intergration of intergral sphere

    Coaxial / Triaxial chuck

    Fixture for Fiber optic coupler test

    Chuck quick Up/Down and fine

    Fixture of PCB / IC test

    adjustment option

    Chuck rotation fine adjustment

    Special Custom design


    For IC/LD/LED/PD testPCB / Packaged device  test ,RF Test etc.


    Compact design

    procision lead screw drive structure, linear movement

    Light weight

    Driver Screws: Zero back lash

    Affordable price

    Available for 50um electrode / PAD probe

    Popular in University and Research laboratory

    LD/LED/PD Light intensity / wavelength testing

    Up to 6 inch wafer test

    IV/CV Characteristic testing of materials / devices

    Customer Service
    Procurement Messages

    Contact number

    0755-2690 6952 turn 801/804/806/814

    Send Email
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