Model TEG series |
Specification |
|
Model | TEG prober-G6 | TEG prober-G8.5 |
Dimension | L: 2500mm * W: 2850mm * H: 2500mm | L: 3500mm * W: 4000mm * H: 2500mm |
Weight about | 9700KG | 14200KG |
Electricity Demand | 380V, 50Hz, 3Phase, approx. 50A Max |
Panel size | L * W ≤1500 * 1850mm, Thickness ≤ 3mm | L * W ≤ 2500 * 2200mm, Thickness ≤ 3mm |
Platform function
|
Gantry structure
| Bridge disgn,can choose double gantry
|
X-Y-Z travel range | 1850 * 1500 * 58mm | 2500 * 2200 * 58mm |
X-Y velocity | 0~600mm/s adjustable | Prober | Probe card | Two sets, can test two sets of |
X-Y resolution | 0.1μm | TEG at the same time |
X-Y Repeatability | ±1μm | Pitch and layout: Customizing |
X-Y axis drive | Linear motion + Grating ruler | Probe material: Tungsten or |
Z velocity | 0~10mm/s adjustable | Beryllium copper |
Z resolution | 0.25μm | Probe and TEG alignment | Coordinate positioning |
Z Repeatability | ±1μm | Pattern matching |
Z axis drive | Servo motor + Grating ruler | Probe and TEG Contact mode | Automatic contact Mechanical
limit edge sensor |
Z axis protection | Motor self-locking + Mechanical
limit protection | and software protection |
Platform flatness | +-50μm | The limit height can be set according
to the thickness of the panel,
and the OD
value can be set. |
Platform coating | Antistatic coating | Probe rotation stroke | +-90° |
Platform high/low temperature | Temp Chuck or Thermal
Stream ( -55~200℃ ) | Probe rotation accuracy | 0.01° |
Microscope | Optical circuit
system ratio | 5X, 10X, 20X, 50X Objects | Rotation repeatability | 0.03° |
Magnification range | 50X ~ 500X | Probe cleaning | Automatic cleaning |
Focus | Auto focus | Electrical test after cleaning |
CCD pixel | 200W / 500W | Prober current leakage | Within 100fA (Test standard: |
Light source | TOP/Bottom coaxial LED light | -5v ~ +5v, without blowing N2 and floating). |
Light adjustable independently | Tester | Test system | Two sets Semiconductor |
Laser | Laser system | Laser cutting system（2.2mj / | parameter testing system,2 |
Pluse Maximum@50Hz ) | * HRSMU + 4 *MPSMU+CV test |
0-100% | +Hing precision matrix switch etc. |
Laser wave length | 1064nm, 532nm, 355nm | TFT test project | Ion |
Spot scale | 1.0um @ 100X object | Ioff |
2.0um @ 50X object | Vth |
Work pattern | One Shot / Burst / Continue | Mobility |
Shape | Adjustable rectangle | Swing |
Control | mode | Automatic test, automatic data load | TFT test project | Rs |
and communication | Rc |
Semi-automatic/full-automatic test | Maximum test voltage | +-200V |
Sample Exchange | Robot | Maximum test current | +-1A |
CIM system | Yes | Current test resolution | 1fA ( No preamplifier ) |
Anti-vibration | Vibration free table installed | Voltage test resolution | 0.5uV |
Industry PC | 23-inch display & computer: i7processor, | Cv test frequency range | 1kHz ~ 5MHz |
2 blocks 1TB hard disk(one of which | Grounding unit accommodation capacity | 4.2A GNDU |
is a backup hard disk), 8G memory, | Control | Security | Frame covered , and the operator operates outside |
1G Independent video card, DVD-ROM | EMO |
Communication
interface | RS232 /EtherCAT/GPIB etc. | Limit sensor ,Motion platform and Laser system limit interlock |
| Alarm |
Application | OLED / TFT - LCD Panel TEG test and Circuit analysis |
Characteristic |
Fastest testing speed in the industry | Ultra high precision |
Stable test results | Mult-probe card design |
Linear Motor platform with 0.1μm resolution | Automatic needle cleaning, Automatic AOI location |
Minimal damage | Automatictest |
Bridge disgn,can choose double gantry
X-Y-Z travel range
1850 * 1500 * 58mm
2500 * 2200 * 58mm
X-Y velocity
0~600mm/s adjustable
Prober
Probe card
Two sets, can test two sets of
X-Y resolution
0.1μm
TEG at the same time
X-Y Repeatability
±1μm
Pitch and layout: Customizing
X-Y axis drive
Linear motion + Grating ruler
Probe material: Tungsten or
Z velocity
0~10mm/s adjustable
Beryllium copper
Z resolution
0.25μm
Probe and TEG alignment
Coordinate positioning
Z Repeatability
±1μm
Pattern matching
Z axis drive
Servo motor + Grating ruler
Probe and TEG Contact mode
Automatic contact Mechanical
limit edge sensor
Z axis protection
Motor self-locking + Mechanical
limit protection
and software protection
Platform flatness
+-50μm
The limit height can be set according
to the thickness of the panel,
and the OD
value can be set.
Platform coating
Antistatic coating
Probe rotation stroke
+-90°
Platform high/low
temperature
Temp Chuck or Thermal
Stream ( -55~200℃ )
Probe rotation accuracy
0.01°
Microscope
Optical circuit
system ratio
5X, 10X, 20X, 50X Objects
Rotation repeatability
0.03°
Magnification range
50X ~ 500X
Probe cleaning
Automatic cleaning
Focus
Auto focus
Electrical test after cleaning
CCD pixel
200W / 500W
Prober current leakage
Within 100fA (Test standard:
Light source
TOP/Bottom coaxial LED light
-5v ~ +5v, without blowing
N2 and floating).
Light adjustable independently
Tester
Test system
Two sets Semiconductor
Laser
Laser system
Laser cutting system（2.2mj /
parameter testing system,2
Pluse Maximum@50Hz )
* HRSMU + 4 *MPSMU+CV test
0-100%
+Hing precision matrix switch etc.
Laser wave length
1064nm, 532nm, 355nm
TFT test project
Ion
Spot scale
1.0um @ 100X object
Ioff
2.0um @ 50X object
Vth
Work pattern
One Shot / Burst / Continue
Mobility
Shape
Adjustable rectangle
Swing
Control
mode
Automatic test, automatic data load
TFT test project
Rs
and communication
Rc
Semi-automatic/full-automatic test
Maximum test voltage
+-200V
Sample Exchange
Robot
Maximum test current
+-1A
CIM system
Yes
Current test resolution
1fA ( No preamplifier )
Anti-vibration
Vibration free table installed
Voltage test resolution
0.5uV
Industry PC
23-inch display & computer: i7processor,
Cv test frequency range
1kHz ~ 5MHz
2 blocks 1TB hard disk(one of which
Grounding unit accommodation capacity
4.2A GNDU
is a backup hard disk), 8G memory,
Control
Security
Frame covered , and the
operator operates outside
1G Independent video card, DVD-ROM
EMO
Communication
interface
RS232 /EtherCAT/GPIB etc.
Limit sensor ,Motion platform
and Laser system limit interlock
Alarm
Application
OLED / TFT - LCD Panel TEG test and Circuit analysis
Characteristic
Fastest testing speed in the industry
Ultra high precision
Stable test results
Mult-probe card design
Linear Motor platform with 0.1μm resolution
Automatic needle cleaning, Automatic AOI location
Minimal damage
Automatictest
