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    LCVD Panel Laser Repair System

    Product Overview

    LCVD laser repair equipment is mainly an automatic repair equipment designed for the poor process and defects of LCD display. With the leading machine vision system of SEMISHARE as the core, LCVD laser repair equipment can provide high-precision repair and low-cost solutions for the defects of LCD finished products and semi-finished products, so as to improve the business efficiency of enterprises to a greater extent.

    Basic Information

    Product number LCVD-G6 | LCVD-G8.5 working environment Open type
    electricity demand 380V,50Hz,3Phase,approx.40AMax / 380V,50Hz, 3Phase, approx.60A Max Control method Full-Automatic
    Product Size 2850mm wide x2500mm long x2500mm high equipment weight About 7500 kg

    Application direction

    TFT-LCD and OLED Array Panel circuit open and short circuit repair,Mask defect repair.

    Technical characteristics

    Product Feature

    ●High power optical image recognition, automatic calibration focus. ●Laser system visual operation, greatly improve the efficiency of repair. ●Linear motor structure,1um laser precision, high speed mute. ●Automatic AOI positioning, automatic upper and lower slice. ●Rich software testing function, high precision calibration of mechanical system. ●Repair shape can be edited, can be multi - station design. ●Leading internal anti - shock system device, more stable operation. ●Electrical shielding system, shielding light and electromagnetic interference.

    Product Feature

    ●High power optical image recognition, automatic calibration focus. ●Laser system visual operation, greatly improve the efficiency of repair. ●Linear motor structure,1um laser precision, high speed mute. ●Electrical shielding system, shielding light and electromagnetic interference. ●Rich software testing function, high precision calibration of mechanical system. ●Minimum machining accuracy up to 1*1um. ●Leading internal anti - shock system device, more stable operation. ●Can be upgraded for sample testing up to 120 inches.


    Model LCVD series

    Specification
    Model LCVD-G6 LCVD-G8.5
    Dimension W: 2850mm*L: 2500mm*H: 2500mm W: 4000mm*L: 3500mm*H: 2500mm
    Weight (about) 7500KG 10500KG
    Electricity Demand 380V, 50Hz, 3Phase, approx. 40A Max. 380V, 50Hz, 3Phase, approx. 60A Max.
    Repair capacity Repairable panel size L * W ≤ 1500mm * 1850mm, L * W ≤ 2500mm * 2200mm, Thickness ≤ 3mm
    Thickness ≤ 3mm Laser Laser system DPSS Laser cutting system
    CVD material W, Cr, MO, Al CW Laser deposition system
    line deposition velocity 5~10μm/s ( Thickness 5000Å ) Energy regulation
    accuracy
    0-1000 steps
    Single defect repair time After positioning, the time of repairing 0-100%
    a single defect is about 5 seconds. Slit size 0~2.5mm
    Recipe Software edit and stroed locally Slit accuracy 1μm
    Cutting width 1μm~50μm adjustable

    Laser energy calibration

    mode

    Automatic calibration
    CVD width 2μm~30μm adjustable Calibration time cost 3mins
    CVD edge accuracy +/-0.5μm Laser energy Better than 2%
    CVD thickness 2000Å ~15000Å Adjustable calibration accuracy
    Resistance of
    <65Ω (width: 5μm, Length : Wavelength Cut Laser: IR 1064nm, GRN 532nm,
    deposition line 50μm, Thickness : 5000 ) UV266nmCVD CW laser: NUV 351nm
    CVD stability Cleaning times by cleaning Pulse width < 12 ns
    machine >10 times Spot size 2.0~ @50X  object 1064nm
    Strong acid-base test > 1H ( test on standard mask)
    Brush wipe > 1H

    Scanning energy

    uniformity

    Better than 5% @IR
    Ultrasonic 1Mhz > 1H Laser lifetime Cut Laser: 1 billion excitation
    Gantry X-Y-Z travel range LCVD-G6 1500 * 1850 * 58mm,
    LCVD-G8.5 2500 * 2200 * 58mm
    CVD CW laser: 8000 hours
    Repair mode Scan mode and Step mode
    X-Y velocity 0~400mm/s adjustable Scanning path Arbitrary path definition
    X-Y resolution(minimum movement) 0.1μm Control Working mode Automatic repair, automatic data
    Z velocity 0~2mm/s Adjustable load, on-line communication
    Z resolution (minimum movement) 0.1μm Manual or automatic repair
    Repeatability accuracy +-5μm Panel load Robot
    Repair alignment accuracy 0.1μm CIM system Yes
    Microscope

    magnification

    50X~ 1000X Anti-vibration Vibration free table installed

    Industry PC

    23-inch display & computer: i7

    objectives

    5X,10X, 20X, 50X NIR, 50X processor, 2 blocks 1TB hard disk
    UV, 50X NUV Objects (one of which is a backup hard disk),

    Optical resolution

    0.7μm 8G memory, 1G Independent video
    card, DVD-ROM
    Objective switching speed 0.2~0.7s Communication interface RS232 / EtherCAT / GPIB etc.

    Security

    Frame covered , and the operator
    Switching lens deviation Less than 3μm operates outside .EMO
    Focus Laser auto focus

    Limit sensor, Motion platform and

    Laser system limit interlock

    Cemera 2 million pixels Alarm
    Lighting TOP/Bottom coaxial LED light,Light adjustable independently
    Direction of application TFT-LCD and OLED array panel short circuit and open circuit repair, Mask defects repair
    Characteristic
    Stable laser repair results Feature-rich software
    Ultrafast laser repair speed Repair shape can be edited arbitrary
    Linear Motor platform with 0.1μm Resolution Automatic AOI defect location
    Minimal damage Multistation desgin
    Laser precision 1μm Automatic panel exchange

    Customer Service
    Procurement Messages

    Contact number

    0755-2690 6952 turn 801/804/806/814

    Send Email
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