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  • Product Overview Functional structure Specifications Download Video

    H12"Integrated Manual Probe Station

    Product Overview

    H series is a high-end comprehensive manual test probe configuration, the device has excellent stability and maneuverability, and the test precision are higher than that of the rest of the industry brand, unique pneumatic chuck mobile technology flexible UPStart modular structure design enhance sexual shockproof system, these are all SEMISHARE advanced innovation technology advantage in the industryAt the same time, the equipment can support late expansion and upgrading, to meet the needs of customers for a variety of test applications. No matter now or in the future, when customers' test needs increase or change, the equipment can be reconfigured and upgraded to truly realize multiple applications with one machine. The equipment is very suitable for the one-step budget acquisition and investment of r&d centers and laboratories in universities.

    Basic Information

    Product number H12 working environment Open type
    electricity demand 220V,50~60Hz Control method Manual Probe Station
    Product Size 1300MM long *920MM wide *920MM high equipment weight About 300 kg

    Application direction

    It is suitable for scientific research and analysis of nano micro devices, spot check and detection, etc., to quickly analyze and test the circuit of the chip on the wafer and judge the product performance by the electrical parameters, and then reduce the loss of the chip defects to the product, so as to improve the yield and carry the rf characteristic test and upgrade and carry the optical fiber spectrum characteristic test.

    Technical characteristics

    >Chuck Air bearing move technology

    Pneumatic type mobile platform has the function of fast moving chuck, can meet the needs of efficient manual test by the corresponding gas float switch, provides three kinds of method of fast moving: one hand control X/Y direction fast moving, hands control samples total plane fast moving traditional ball/bearing type samples can only achieve X/Y axis one-way movement, and movement speed slower;Although the ordinary air-floating sample table can realize full plane rapid movement of the sample table, it cannot realize one-way accurate movement positioning of the X/Y axis, which can meet the needs of production measurement. The 3-weight air-controlled sample table perfectly combines and realizes the above two functions.

    >Microscope air - controlled lifting control

    The microscope can rise and fall 50mm by means of air control. The microscope can rise and fall smoothly by means of high quality valve control and fine adjustment of high pressure air inlet and outlet throttling, so as to facilitate the replacement of objective lens and better protect against accidental contact damage between objective lens and fixture in the test.

    > Three - stage lifting needle base platform

    The needle seat platform can rise and fall rapidly (0,300um,3mm)+ fine adjustment (40mm, moving resolution 2~5um). All parts of Platen can rise and fall at the same time (there is no different phenomenon). After rising and falling, the repeatability of the probe in x, Y and Z directions of needle marks on the pad is better than that of othersThe 1um, repeatable (1 m) needle base platform has three discrete positions for contact, separation (300 m) and loading (3mm) and is equipped with a safety lock to prevent accidental damage to the probe or wafer while providing intuitive control and accurate contact positioning for the most accurate measurement. This function is important in high frequency and high power testing.

    Air floating self-balancing shock table

    Mesa cr17 10 high quality high permeability stainless steel processing of honeycomb support structure shockproof system USES the import of South Korea's big companies air spring type brace shockproof platform by the shape of the air spring material spring chamber volume and aid tank capacity damping aperture and level regulator and a series of suspension design, implement the system intrinsic frequency is 1.5 Hz, vertical level of the eigen frequency of 1.2 Hz low natural frequency, load bearing of 400 kg of excellent bearing capacity effectively avoid small to test the vibration of low frequency band.

    >Large handle differential head drive

    Chuck the mobile platform is equipped with coarse and fine adjustment function, fine adjustment knob driven by the industry's top Japan Mitutoyo big handle differential head, small compared with the traditional differential head adjustment, feel more comfortable to adjust operation more smoothly and no return bad, really realize super smooth efficient test manually, improve test efficiency, saving the cost of customer tests.

    > Loadable laser

    Multiband laser cutting system can be applied to a load in the vast majority of microscope on the analysis of the failure, can realize precise cutting and selective onlookers level material removal precision and reliable advanced laser transmission system (ABDS) can choose different band to deal with different material cutting and cutting work laser output energy of 2.7 mJ, largest energy adjustable series 300 water cycle cooling structure make the system more compact and dispensing with maintenance.


    Model SH series
    Specification
    Style SH-6 SH-8 SH-12
    Dimension L: 820mm*
    W: 720mm*
    H: 890mm
    L: 960mm*
    W: 850mm*
    H: 900mm
    L: 1300mm*
    W: 920mm*
    H: 920mm
    Weight (about) 170KG 230KG 300KG
    Electricity Demand 220VC, 50~60Hz
    Chuck Size & Rotation angle 6", 360° Rotation 8", 360° Rotation 12", 360° Rotation
    X-Y Travel range 6" * 6" 8" * 8" 12" * 12"
    Moving resolution 1μm
    Sample fixed mode Vacuum adsorption
    Electrical design Electrical Floating with Banana plug adapter, can be used as a backside electrode
    Platen U shape platen 6 micropositioners available 8 micropositioners available 12 micropositioners available
    Move range & adjustment mode Platen can be quickly lifted up and down 6mm for fast probe tip seperation
    Platen can be fine tuned up and down 25mm precisely with 1μm resolution
    Microscope Travel range X-Y axis : 2" * 2",  Z axis : 50.8mm
    Moving resolution 1μm
    Switching object lens Microscope tilting 30°manually by Lever
    Magnification 20~4000X
    Lens specification Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 100Xoption
    CCD pixels 50W (Analog) / 200W (Digital) / 500W (Digital)
    Micropositioner specification X-Y-Z Travel range 12mm-12mm-12mm / 8mm-8mm-8mm
    Mechanical resolution 10μm / 2μm / 0.7μm / 0.1μm
    Current leakage accuracy 10pA / 100fA (with Shielding Box
    Cable connectors Banana head / Crocodile clip /  Coaxial / Triaxial
    Application

    Wafer test, Photoelectric device test, PCB / IC test, RF test,  high voltage and high

    current measurement etc.

    Optional Accessories Chuck quick roll out mechanism
    Microscope tilt mechanism (Tilting 30° manually by Lever )
    Microscope pneumatic lifting mechanism
    Laser repair with cutting,ablation and welding function
    Probe clamp
    Dark field of microscope / DIC / Normarski test, Light intensity / wavelength test
    IC hotspot detection by LC
    High voltage and high current measurement
    Hot chuck
    High/Low temprature chuck
    Shielding box
    Special adapter
    Vibration free table
    Gold-plated chuck
    Coaxial / Triaxial chuck
    Chuck quick move-out and fine adjustment mechanism
    Chuck rotation fine adjustment
    Light intensity / wavelength testing
    RF Testing
    Active probe
    Low current / Capacitance test
    Intergartion of intergral sphere
    Fixture for Fibre optic coupler test
    Fixture of Package IC test
    Fixture of PCB test
    Special Custom design
    Characteristics
    Stable structure, Platen can be quick lifted and fine-tuned, Suitable
    for probe card installation and usage
    Comfortable large handle, Driver Screws: Zero back lash
    Compatible with high magnification metallographic microscope Internal circuit/ electrode/ PAD probe
    Suitable in University and Research laboratory LD/LED/PD Light intensity / wavelength testing
    Up to 12 inch wafer testing IV/CV Characteristic testing of materials / devices
    High precision lead screw drive structure, linear movement

    High frequency characteristic test of devices

    (up to 300GHz frequency)



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    0755-2690 6952 turn 801/804/806/814

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