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Wafer Probing Machine Tester with the X12 | SEMISHARE

The X12 semi-automatic wafer probing machine tester,a powerful wafer probing solution which can work 7*24 hours at -60℃ to 300 ℃ to meet customers' unique testing needs.

SEMISHARE: Revolutionizing Semiconductor Testing with Advanced Wafer Probing Solutions

In the ever-evolving landscape of semiconductor manufacturing, the demand for precise, efficient, and reliable testing solutions has never been greater. SEMISHARE stands at the forefront of this technological revolution, offering cutting-edge wafer probing, wafer prober tester, and wafer probing machine technologies that are reshaping the landscape of semiconductor testing. Our commitment to innovation is evident in our state-of-the-art solutions designed to meet the most stringent demands of modern semiconductor research and production.

Understanding Wafer Probing: The Foundation of Semiconductor Quality Assurance

What is wafer probing? At its core, wafer probing is a critical process in semiconductor manufacturing that involves electrically testing semiconductor wafers before they are diced into individual chips. This essential step ensures the functionality and performance of each device, playing a pivotal role in identifying defects and maintaining the highest standards of quality in semiconductor production.

SEMISHARE's wafer probing solutions take this concept to new heights, offering unparalleled precision and efficiency in semiconductor testing. Our advanced wafer probing technologies integrate cutting-edge automation with high-precision measurement capabilities, allowing for rapid and accurate testing of complex semiconductor devices.

The Evolution of Wafer Prober Testers

The wafer prober tester has come a long way since its inception. SEMISHARE's latest wafer prober tester models represent the pinnacle of this evolution, incorporating advanced features that significantly enhance testing capabilities:

1. Multi-Site Testing: Our wafer prober tester can simultaneously test multiple dies on a wafer, dramatically increasing throughput.

2. Adaptive Testing Algorithms: The wafer prober tester can adjust testing parameters in real-time based on initial results, optimizing the testing process for each unique device.

3. Integrated Data Analytics: Our wafer prober tester includes powerful analytics tools, providing in-depth insights into device performance and helping identify trends and potential issues early in the production process.

4. Advanced Probe Card Compatibility: SEMISHARE's wafer prober tester is designed to work with a wide range of probe card technologies, offering flexibility in testing approaches.

The Wafer Probe Test Process: A Symphony of Precision and Efficiency

The process of wafer probe test is a sophisticated dance of technology and precision. It begins with the careful mounting of the wafer onto a specialized probing station. SEMISHARE's wafer probing machine is engineered to handle this delicate process with utmost care, ensuring the wafer's integrity throughout the testing procedure.

Once mounted, the wafer prober tester aligns the probes with the wafer's test pads using advanced optical recognition and alignment systems. This crucial step is where the precision of SEMISHARE's technology truly shines, ensuring accurate contact even with the smallest of test pads.

With alignment complete, the wafer probing machine conducts a series of electrical measurements as defined by the user. These tests can range from basic parametric measurements to complex functional assessments, all executed with the high precision and speed that SEMISHARE's technology is known for.

Advancements in Wafer Probing Machine Technology

SEMISHARE's wafer probing machine technology has seen significant advancements in recent years:

1. Enhanced Precision: Our latest wafer probing machine models offer positioning accuracy down to the sub-micron level, crucial for testing the latest generation of semiconductor devices.

2. Improved Environmental Controls: The wafer probing machine now incorporates advanced temperature and humidity control systems, ensuring consistent test conditions across long test runs.

3. Increased Automation: SEMISHARE's wafer probing machine features enhanced automation capabilities, reducing the need for manual intervention and minimizing the risk of human error.

4. Advanced Imaging Systems: Our wafer probing machine includes high-resolution imaging systems for real-time observation and analysis of the probing process.

5. Integrated Fault Detection: The wafer probing machine now includes sophisticated fault detection algorithms, identifying potential issues before they can impact test results.

The Role of Probes in Semiconductor Testing

A probe in semiconductor testing is more than just a simple contact point. It's a sophisticated tool designed to transmit electrical signals to and from the device under test with minimal interference. SEMISHARE's probes are engineered for optimal performance, ensuring reliable contact and accurate measurements across a wide range of testing scenarios.

Our probe technology stands out for its:

1. High-precision tip geometry for accurate contact

2. Advanced materials for durability and consistent electrical properties

3. Customizable configurations to meet specific testing requirements

4. Compatibility with a wide range of test parameters and conditions

The Probing Process: A Delicate Balance of Technology and Technique

The probing process is a meticulous procedure that requires both advanced technology and skilled execution. SEMISHARE's wafer probing solutions are designed to streamline this process, offering:

1. Automated alignment systems for precise probe positioning

2. Real-time force feedback to ensure optimal contact pressure

3. Multi-site probing capabilities for increased throughput

4. Advanced imaging systems for accurate pad recognition and probe placement

What Does a Wafer Prober Do?

A wafer prober is a sophisticated machine designed to perform detailed electrical measurements on semiconductor wafers. SEMISHARE's wafer prober goes beyond basic functionality, offering:

1. High-speed testing capabilities for increased productivity

2. Wide temperature range testing for comprehensive device characterization

3. Integration with various measurement instruments for versatile testing scenarios

4. Advanced data analysis tools for real-time performance evaluation

The Wafer Tester: A Critical Tool in Semiconductor Manufacturing

A wafer tester is an essential device in the semiconductor manufacturing process, used to evaluate the electrical characteristics of semiconductor wafers. SEMISHARE's wafer tester technology offers:

1. High-precision measurement capabilities across a wide range of parameters

2. Flexible test program development for customized testing requirements

3. Integration with automated handling systems for high-volume testing

4. Comprehensive data logging and analysis for quality control and process improvement

Understanding the Prober: The Heart of Wafer Testing

A prober is the core component of any wafer testing system. It's responsible for making contact with the wafer's test pads and facilitating the electrical tests. SEMISHARE's probers are designed for:

1. High-precision positioning for accurate contact

2. Stable operation for consistent measurements

3. Compatibility with various probe card technologies

4. Easy maintenance and calibration for long-term reliability

The Wafer Probing Machine: A Marvel of Modern Engineering

SEMISHARE's wafer probing machine represents the pinnacle of semiconductor testing technology. This advanced system integrates multiple technologies to provide a comprehensive testing solution:

1. High-speed wafer handling for improved throughput

2. Precision probe alignment for accurate measurements

3. Advanced environmental controls for testing across a wide temperature range

4. Integrated data management systems for comprehensive test reporting

How Are Wafers Tested? The SEMISHARE Approach

SEMISHARE's approach to wafer testing combines advanced technology with efficient processes:

1. Automated wafer loading and alignment using our state-of-the-art wafer probing machine

2. Precision probe contact using advanced force control systems integrated into our wafer prober tester

3. Comprehensive electrical testing using our wafer probing machine's integrated measurement instruments

4. Real-time data analysis and reporting for immediate quality assessment, a key feature of our wafer prober tester

SEMISHARE's X Series Semi-Automatic Probe Station: Setting New Standards in Wafer Testing

The X Series Semi-Automatic Probe Station represents the culmination of SEMISHARE's expertise in wafer probing technology. This integrated and highly efficient wafer probing machine is specialized in testing the performance of various advanced chips, offering:

1. Versatile functionality, including electric, optical, and microwave testing capabilities

2. Industry-leading temperature range (-60°C to 300°C) for comprehensive device characterization

3. Superior test accuracy for reliable results

4. Customizable configurations to meet specific testing requirements

Technical Highlights of SEMISHARE's Wafer Probing Solutions

1. Efficient CHUCK System: Our wafer probing systems, including our advanced wafer prober tester, increase test efficiency by more than 40%, with a running speed exceeding 70mm/s and motion precision of 1 micrometer.

2. Advanced Imaging Technology: We incorporate industry-leading three zoom microscope views with high-speed CCD and high-precision cameras for precise positioning and high-definition imaging in our wafer probing machine.

3. Innovative CHUCK Module Design: Our unique Chuck XY axis design ensures higher motion precision and stability in our wafer prober tester, with a larger rotation angle range for more flexible and convenient operation.

4. O-type Needle Seat Platform: Our wafer probing machine design allows for the placement of up to 12 needle seats, increasing testing efficiency by 50%.

5. Proprietary Airfilm Shock Absorption System: This system ensures stable operation and precise control of the platform's moving parts in our wafer prober tester, even at high speeds.

6. Advanced Anti-interference Shielding System: Our closed shielding cavity reduces system noise and blocks interference effectively, providing a superior test environment for weak electric signal testing in our wafer probing machine.

7. Software Integration: SEMISHARE's wafer prober tester and wafer probing machine come with advanced software that allows for easier control and data analysis, streamlining the testing process.

8. Customization Options: Our wafer probing machine and wafer prober tester can be customized to meet specific testing needs, ensuring that our clients have the exact tools they need for their unique applications.

Conclusion: SEMISHARE's Commitment to Advancing Semiconductor Testing

In the dynamic field of semiconductor technology, the ability to perform precise and reliable wafer probing is becoming increasingly crucial. SEMISHARE's comprehensive range of wafer probing, wafer prober tester, and wafer probing machine solutions offers semiconductor manufacturers and researchers the tools they need to push the boundaries of device performance and reliability.

Our commitment to innovation, precision, and customer support positions SEMISHARE as a trusted partner in the semiconductor industry. By continually advancing our wafer probing technologies, including our state-of-the-art wafer prober tester and wafer probing machine, we enable our clients to stay at the forefront of semiconductor development, driving progress in fields ranging from consumer electronics to advanced computing systems.

Whether you're developing cutting-edge processors, high-performance memory devices, or next-generation sensors, SEMISHARE has the wafer probing solutions you need to ensure the quality and reliability of your innovations. Our wafer prober tester and wafer probing machine are designed to meet the most demanding testing requirements, providing the accuracy and efficiency needed in today's fast-paced semiconductor industry.

Visit https://www.semishareprober.com/ to discover how our advanced wafer testing technologies, including our cutting-edge wafer prober tester and wafer probing machine, can elevate your semiconductor research and production capabilities, propelling your success in this dynamic and challenging industry. With SEMISHARE's wafer probing solutions, you're not just testing semiconductors – you're shaping the future of technology.

製品概要 機能構造 仕様 ダウンロード ビデオ
Xシリーズ半自動プローブステーション

製品概要

Xシリーズは、各種先進チップの性能試験に特化した統合型高効率半自動ウェハプローブプラットフォームです。電気・光波・マイクロ波などの多機能を統合し、業界最高レベルの温度幅と試験精度を実現。-60~300℃の広温度範囲で信頼性の高いウェハテストを提供します。※特殊寸法や性能要求に応じたカスタム設計ソリューションも対応可能※

基本情報

製品番号 X6/X8/X12 作業環境 オープン型
電力需要 220V,50~60Hz 制御方法 半自動
製品サイズ 1060mm*1610mm*1500mm 機器重量 約1,500kg

応用方向

本装置は12インチ/8インチ/6インチウェハのSi/GaN/SiCなど各種先進チップの性能試験に対応。I-V・C-V・光・RF信号・1/fノイズ解析などのための計測機器を装備可能で、機能豊富なデバイステストを実現。拡張可能な高電力ウェハテスト・RFテスト・自動テスト機能を備え、温度制御システムの搭載により、顧客の高低温度環境下におけるあらゆるウェハデバイス性能試験要求を満たします。

技術的特徴

業界最高効率のCHUCKシステムで、テスト効率が40%以上向上

●業界最高効率のCHUCKテストシステム:動作速度>70mm/s、動作精度1μm、位置決め時間500msという業界最高水準のシステム動作パラメータを達成。超高精度テストと高効率化により、各種ウェハ・デバイスの高再現性・安定性テストを実現し、業界他社のプローブブランドと比較してテスト効率を40%以上向上させます。
●業界最大の-60~300℃という広温度範囲をカバーし、温度制御精度±0.08℃以下を保証。高低温度環境下での信頼性あるウェハテストを提供します。
●低重心4次元モーションのコンパクト構造設計により、70mm/sの高速動作を維持しながら加減速時の安定性を確保。

業界をリードする3倍イメージング技術

SEMISHARE特許技術の3ズーム顕微鏡ビューシステムを内蔵し、120倍~2000倍の可変倍率光学増幅を実現。サイズビューを同時表示可能で、プローブ操作をより容易にします。Basler製200万画素高速CCD×2基、23型ディスプレイ、ミツトヨ高精度高解像度カメラを搭載。高安定性・高精細な精密位置決め、画像出力・高精度測定・動的モニタリングを実現しています。

補助CHUCKモジュールによるシリコンウェハ安全上下機構

●業界独自のチャックXY軸設計により、市場他社プローブシステムで常見される積層板の抵抗による動作安定性低下を解消。XY軸移動時に積層板の影響を受けず、更高精度で安定した動作を実現。
●業界他社と比較し、SEMISHAREプローブステーションはチャンバーを1回開放するだけでストローク370mmの長距離チャック機構全体を引き出し可能で、ウェハの手動載荷がより迅速・容易に。さらにチャックの回転角度範囲が広く、ウェハ手動配置の要求度が低減され、操作の柔軟性と利便性が向上しています。

O型ニードルベースプラットフォーム設計

本プローブテストシステムはO型ニードルベースプラットフォーム設計を採用し、ニードルベースの空間を最大限に活用。最大12個のニードルベースを同時配置可能で、市場他社のプローブブランドと比較してニードルベース数を50%増加させ、より効率的で迅速なテストを実現しています。

エアフィルム式防振システム

業界唯一の高性能エアフィルム式防振システムを内部に統合し、外部遮断バリアとの二重設計により、操作員の接触による振動を効果的に防止。さらに、長期間経年変化の少ない鋳物を基盤として採用し、業界最速1秒の動作中でも振動を抑制。装置の安定動作を確保するとともに、2000倍拡大時の画像揺れを防止します。高精度制御バルブによりプラットフォーム可動部の高さ誤差を0.1mmに保ち、高速ダイ間移動テスト能力を実現。システム全体が高速移動時でも安定した動作状態を維持でき、テスト効率を大幅に向上させます。

干渉防止シールドシステム

EMI/スペクトルノイズ/外部光線を遮断する閉鎖型シールドキャビティを採用。キャビティ表面は導電性酸化・ニッケルメッキ処理を施し、部品間の導通状態を確保することで遮蔽効果を実現。システムノイズの低減と干渉の効果的遮断により、微弱電気信号テストに最適な低漏洩電流環境を提供します。さらに、閉鎖型チャンバーにより低温環境でのテストサンプル結露を防止し、ウェハやデバイスが高低温度環境下で迅速・安全・信頼性の高いテストを可能にします。

独自開発のソフトウェア統合システムにより、高い互換性を実現

●半自動制御対応(手動テスト/自動テスト切替可能)
●自動ウェハ較正・自動ウェハマッピング・自動ダイサイズ測定・自動アライメント・リモートテストデータアクセス機能
●RFプローブモジュールのワンクリック自動較正&自動ニードルクリーニング機能
●4軸チャック精密較正ワンクリック自動化(マイクロンパッドポイント測定対応)
●単発テスト/連続テスト切替対応
●強力なデータ保存・処理能力
●BIN値分類によるNGデバイス判定機能
●OS・アプリケーションシステム・デバイステストシステムの個別アップグレード可能なマルチシステム統合
●直感的で簡便な操作設計により操作訓練時間を効果的に短縮

柔軟なオプション設定と拡張性

●計測器接続の容易性とシステムの自動拡張・アップグレード対応(温度制御システム搭載可能)
●多様なテストモジュールを用意し、六軸ポジショナやRFケーブルなど、各種治具・ニードルカード・プローブテーブルとの連携が可能
●業界最高水準のシステム動作パラメータと機能を備え、多様なテストニーズに対応
●業界顧客にとって理想的な半自動プローブテーブル装置の選択肢を提供

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