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Model HALL series
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Specification
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Brief introduction
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This system is integrated with Keithley 2400 / 2600 series high precision source meter and Semishare Polaris high
and low temperature platform. It is designed by using The Van Der Pauw Law for high precision measurement of
the carrier types of semiconductor materials (P type / N type),Carrier concentration, Mobility ratio, Resistivity,
Hall coefficient and other parameters test, Can be applied to various materials such as Si,SiGe,SiC,GaAs,
InGaAs,InP,GaN etc.
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Software operating system
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Under the environment of Windows 98 / ME / 2000 / NT / Xp
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Effective current output range
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6nA~100mA
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Effective voltage measurement range
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-5~5V
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Carrier concentration(/cm3)
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107 – 1021
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Mobility (cm2/Vs)
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1~107
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Resistivity (Ohm.cm)
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10-4 - 107
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A/B ratio
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Ok
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RHD(cm3/C)
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Ok
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RHC(cm3/C)
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Ok
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RH(cm3/C)
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Ok
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Sheet Resistance(Ohm)
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Ok
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Temperature
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Temperature (k): normal temperature and
77k , two temperature points
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Option: 77k~500k 0. 1 degrees Celsius
accuracy, can be set by software
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Instrument size and weight
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Mainframe size
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H: 89mm × W: 213mm × L: 370mm
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Weight
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3.21KG
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Working environment requirements
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0°–50°C, 70%R.H.
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Storage environment requirements
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–25°C to 65°C
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Dimention of the Van der pauw rule
terminal converter
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200×120×110 mm (W×H×D)
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Net weight
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7.7KG
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Measuring material
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All semiconductor films such as Si, SiGe, SiC, ZnO, GaAs, InGaAs, InP, GaN, ITO (p-type and n-type)
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Characteristic
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Keithley test platform
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Feature-rich software
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Ultra-high precision source meter
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User friendly UI
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Modular design
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High and low temperature environment
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