Project

Description

Processing time (1 defect/piece, including positioning time)

15 s

Panel size range

5”-14”

Panel thickness

0.1-5mm

Motion resolution

±0.1μm

Repeat positioning accuracy

±1μm

Slit accuracy

≤±1μm

Autofocus objective lens switching center offset

≤±1μm

Deposition parameters

Deposition mode:Scan and Step

Deposition shape: rectangular and circular, length, width, side length or diameter
The actual size of the spot can be adjusted and displayed by software

Step deposition rectangle size range:
3μm*3μm~30μm*30μm, adjustment accuracy 1μm

Deposition edge accuracy

±0.5μm

Deposition thickness

2000 Å ~15000Å adjustable

Maximum total power

3.5KW

AC 220V ±5% 50Hz

UPS

1000VA/500W  3-20 minutes (half load)

Consumables

Compressed air CDA (0.6Mpa, 0~1L/min)

High purity argon Ar (0.6Mpa, 0~5L/min)

High purity Cr(CO)6 (purity higher than 99.8%) High purity W(CO)6 (purity higher than 99.8%) or Mo(CO)6 (purity higher than 99.8%)

Size

1230*1390*2410

Computer configuration

i5-6500CPU, 8GDDR4 memory, 128G solid state drive + 1T mechanical hard disk, 300W industrial-grade power supply, beta version win1064-bit system, PCIeX16, PCIeX4, PCI slot X5, motherboard Gigabit network port X2, serial port X6